Fabrication & Clean Room Tools


Clean room test Thursday 4 p.m to 5 p.m ( when required)
Clean room safety presentation Tuesday 4 p.m to 5 p.m( when required)

About Clean Room
A Class 100 clean room of about 800 sq. ft. area has been created on the ground floor while the first floor has been converted to Class 1000 clean room of about 3600 sq. ft. A separate building has been constructed for housing the backup generators and power substation. The fabrication facilities are housed in the clean rooms on the ground and the first floor.

Clean Room Co-Ordinator
1. Dr. J.P Singh
2. Dr. B Mitra
3. Dr. Vijay Kumar

Clean Room 1
a) E-Beam writing system
b) Maskless Photolithography
It is 800 sq feet class 100 clean Room .

Clean Room 2
a) MA6 double sided Optical Mask Aligner
Its is 800 sq feet class 1000 clean room

Clean Room 3
a) E-beam Evaporation system
b) Sputtering System 1 & 2
c) Thermal Evaporation System
It is 1000 sq. feet class 1000 clean room

Clean Room 4
a) Reactive Ion etching system
c) PECVD system
It is 1000 sq. feet class 1000 clean room.

Clean Room 5
a)Chemical Processing
It is 800 sq. feet class 1000 clean room.

Reactive Ion Etching (RIE)


Electron Beam Evaporation System

electron beam evaporation system

inductively Coupled Plasma Reactive Ion Etching System


Plasma Enhanced Chemical Vapour Deposition System